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Advanced Technologies Based on Wave and Beam Generated by Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova PDF

By Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova (eds.)

ISBN-10: 9048151910

ISBN-13: 9789048151912

ISBN-10: 9401706336

ISBN-13: 9789401706339

This quantity relies at the lectures on the NATO complex research Institute, entitled "Advanced applied sciences according to Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from may possibly 22 until June 1, 1998. It attracted nearly a hundred individuals from sixteen various international locations. The assembly mixed varieties of scientists from complicated specialists to aspiring younger researchers. It aimed toward stimulating destiny improvement by way of providing-across borders- cross-fertilization and exchanges among formerly unconnected teams. this is often mirrored within the contents of the amount which covers the lectures given. The publication additionally includes in a moment half forty three poster displays in most cases from more youthful contributors with beneficial complementations and specifica­ tions to the lectures. With its themes the complex examine Institute constitutes the 1st try to compile in an geared up demeanour 3 parts of labor on plasma applied sciences: complicated efforts in keeping with wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas.

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3. 1. GENERAL FEATURES The experimental work carried out on SWDs in the 1970's and 1980's was limited to cylindrical hollow dielectric tubes with lengths much larger than R. Such a tube configuration, even though convenient for basic investigations and modeling, was not adequate for some applications. 1 ). At approximately the same time (1989), large-area configurations of a new kind began to be reported, all of them heavily oriented toward plasma processing. The principle of operation of these novel plasma sources is the same as that of the classical long tubular SWDs, although they have some distinct characteristics.

Waveguide Coupling slots Movable short II "0 Plasma chamber Figure I 0 : Planar discharge system with a dielectric disk top-fed from inclined slots [72]. Dielectric Disk Top-fed from a Circular Slot (Odrobina, Kudela, Kanda, 1998). 45 GHz system proposed by Professor Kando's group at Shizuoka University [75]. A large dielectric disk (fused silica, approximately 300 41 mm in diameter, 15 mm thickness) is captured at its periphery by a conducting enclosure (312 mm in diameter, 350 mm in length).

They do not exchange energy [11 ]. This contrasts with discharges sustained in resonant cavities where the electromagnetic system, \IDder minute variations in discharge conditions, can jump from one mode to another, usually leading to hysterisis on plasma density with HF power variation. Working with non-resonant systems ensures stability and reproducibility of the plasma column \IDder given discharge conditions, namely nature and pressure of the gas, configuration, dimensions and material of the discharge tube, frequency and mode of the wave and, eventually, intensity of the static axial magnetic field.

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Advanced Technologies Based on Wave and Beam Generated Plasmas by Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova (eds.)


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